B doping toward for realization of In<sub>2</sub>O<sub>3</sub>-based TFT without thermal treatment

Shinri Yamadera; Kanta Kibishi; Ayumu Nodera; Yuki Kumamoto; Shun Mori; Shinya Aikawa

Presentation information

Poster presentation

21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[17a-PB01-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Fri. Mar 17, 2023 9:30 AM - 11:30 AM PB01 (Poster)

9:30 AM - 11:30 AM

[17a-PB01-20] B doping toward for realization of In₂O₃-based TFT without thermal treatment

〇Shinri Yamadera¹, Kanta Kibishi¹, Ayumu Nodera¹, Yuki Kumamoto¹, Shun Mori¹, Shinya Aikawa¹ (1.Kogakuin Univ.)

Keywords:TFT

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Presentation information

[17a-PB01-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[17a-PB01-20] B doping toward for realization of In2O3-based TFT without thermal treatment

[17a-PB01-20] B doping toward for realization of In₂O₃-based TFT without thermal treatment