[17p-A205-1~18] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17p-A205-2] Color change of Plasma Indicator with inorganic colorant by N₂ plasma

〇Natsumi Hirayama¹, Ayaka Asami¹, Yu Yamakawa¹, Seisaku Oshiro¹, Kazuhiro Uneyama¹ (1.Sakura Color Products Corp.)

Keywords:plasma indicator, N2 plasma, color change

‘Plasma Indicator’ is a plasma evaluation tool that shows a change in color upon detecting radicals or ions in plasma. We have previously reported that the color of the indicator was changed by Ar, O₂ and CF₄ plasma. In this study, we investigated a color change of the indicator with inorganic colorant by N₂ plasma. As a result, it was found that the hue of the color change was different in chromaticity measurement between N₂ and Ar plasma despite both showed same dark gray color visually. That means Ar and N₂ plasma can cause different phenomena on the surface of the indicator. In this presentation, these details are reported.