The 70th JSAP Spring Meeting 2023

Kazuhiro Karahashi

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Chairperson, etc.

Fri. Mar 17, 2023 1:00 PM - 5:45 PM A205 (Building No. 6)

  • Oral presentation
  • | 8 Plasma Electronics
  • | 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17p-A205-1~18] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Kazuhiro Karahashi(Osaka univ.), Sumiko Fujisaki(Hitachi, Ltd.)