[17p-A405-1~14] 3.6 Laser processing (formerly 3.7)

△ [17p-A405-10] Stable formation of femtosecond-laser-induced periodic nanostructures on glass with feedback control

〇Daisuke Nagai^1,2, Hideyuki Takada², Aiko Narazaki², Godai Miyaji¹ (1.TUAT, 2.AIST)

Keywords:femtosecond laser processing, nano periodic structure, in-process monitoring

We have demonstrated that the target surface having the sub-wavelength periodic nanostructures formed by femtosecond laser pulses on a synthetic quartz substrate surface decreases the reflectivity as it increases transmittance. That indicated the possibility of the in-process monitoring method of nanostructure formation. By using this monitoring method to control the laser power during laser processing, we succeeded in reducing the defective areas to about one-fifth of that without PID control.