[17p-B414-1~15] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

△ [17p-B414-1] Deformation and contact path of PVA brush nodule in relative motion on a flat plate

〇(M1C)Shota Suzuki¹, Yuki Mizushima¹, Satomi Hamada², Ryota Koshino², Akira Fukunaga², Toshiyuki Sanada¹ (1.Shizuoka Univ., 2.Ebara Corp)

Keywords:post-CMP cleaning, PVA brush

In this study, we focused on the transfer of liquid from the PVA brush when it contacts and deforms the surface to improve the efficiency of PVA brush cleaning used in post-CMP cleaning. In the experiment, we reproduced the relative motion of a brush rotating about a horizontal axis on a wafer rotating about a vertical axis and analyzed the brush deformation and contact trajectory during contact between the PVA brush and the wafer.