The 70th JSAP Spring Meeting 2023

Presentation information

Print

Oral presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[17p-B414-1~15] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

Fri. Mar 17, 2023 1:00 PM - 5:00 PM B414 (Building No. 2)

Koichiro Saga(Sony), Nobuya Mori(Osaka Univ.), Hajime Tanaka(阪大)

2:30 PM - 2:45 PM

[17p-B414-7] Characterization of Electronic charged States of Si-QDs on Thermally Oxidized SOI Substrates as Evaluated by Using an AFM/Kelvin Probe Force Technique

〇(D)Yuki Imai1, Katsunori Makihara1, Yuji Yamamoto2, Wei-Chen Wen2, Noriyuki Taoka1, Akio Ohta1, Seiichi Miyazaki1 (1.Nagoya Univ., 2.IHP)

Keywords:Silicon, Quantum dot, AFM/KFM