3:00 PM - 3:15 PM
[17p-D511-7] In-plane Thermal Diffusivity Measurement of a Suspended SiNx
Membrane by Temperature Wave Analysis
Keywords:thermal diffusivity, THIN membrane
The thermal properties of thin films are crucial for their applications in heat-intensive environments such as thermoelectrics and power electronics. In this work, we compared different configurations for a previously developed thermal measurement device based on a 50 nm or 150 nm thin SiNx membrane.
The device allows measurement of thermal parameters for different heater-sensor distances utilizing a temperature wave analysis method. Different configurations for the sensor position (linear or spiral shaped array) and the substrate (membrane thickness of 50 nm or 150 nm) are compared.
The device allows measurement of thermal parameters for different heater-sensor distances utilizing a temperature wave analysis method. Different configurations for the sensor position (linear or spiral shaped array) and the substrate (membrane thickness of 50 nm or 150 nm) are compared.