[17p-E102-1~20] 12.7 Biomedical Engineering and Biochips

△ [17p-E102-7] Development of solution-gated thin-film transistor with one piece of ITO and its application for biosensing

〇(M1)Ritsu Katayama¹, Toshiya Sakata¹ (1.The Univ. of Tokyo)

Keywords:Indium-Tin-Oxide, Biosensors, Thin film transistor

ITO is a conductive oxide but exhibits semiconducting properties at a thickness of around 20 nm. Therefore, it is possible to fabricate fine solution-gate ITO-TFTs showing good transistor properties by controlling the thickness to about 20 nm by etching a part of a 100 nm conductive ITO film with acid. In this study, solution-gate ITO-TFTs were fabricated using that technique, and the possibility of controlling device properties and biomolecule measurements, which are essential for biosensing applications, was investigated.