The 70th JSAP Spring Meeting 2023

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Symposium (Oral)

Symposium » Trends and Prospects of MEMS and Microfabrication Technologies Contributing to the With-Covid-19 Era

[17p-E502-1~9] Trends and Prospects of MEMS and Microfabrication Technologies Contributing to the With-Covid-19 Era

Fri. Mar 17, 2023 1:30 PM - 5:00 PM E502 (Building No. 12)

Masahide Goto(NHK), Toshihiro Takeshita(産総研), Toshishige Shimamura(NTT)

1:35 PM - 2:05 PM

[17p-E502-2] Microfabrication technologies supporting MEMS devices

〇Hiroshi Miyajima1 (1.Sumitomo Precision Products)

Keywords:Si DRIE, PE-CVD, Minimal Fab

Microfabrication technologies of Silicon and its compounds have been supporting the commercialization of various MEMS devices. This talk will introduce their latest status primarily based on the products of SPP Technologies Co., Ltd., (a joint venture between Sumitomo Precision Products. Co., Ltd. and SPTS Technologies Ltd.).