The 70th JSAP Spring Meeting 2023

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Symposium (Oral)

Symposium » Trends and Prospects of MEMS and Microfabrication Technologies Contributing to the With-Covid-19 Era

[17p-E502-1~9] Trends and Prospects of MEMS and Microfabrication Technologies Contributing to the With-Covid-19 Era

Fri. Mar 17, 2023 1:30 PM - 5:00 PM E502 (Building No. 12)

Masahide Goto(NHK), Toshihiro Takeshita(産総研), Toshishige Shimamura(NTT)

4:25 PM - 4:55 PM

[17p-E502-8] MEMS Doppler Sensors and their Applications in Healthcare

〇Renshi Sawada1 (1.Palmens Co.,Ltd.)

Keywords:MEMS, Doppler Sensor

Two types of micro-Doppler sensors using MEMS technology are described.One is based on beat signal resulting from the interference between two Doppler shifted light beams from moving objects. This sensor can measure the absolute value of the velocity. The other is based on the probability application to the behavior of the speckle pattern resulting from interference of scattering light. This probability application based sensor cannot measure the absolute value of velocity. However, this sensor is immune to the vibration and the fixing direction of the sensor.