[17p-PA03-1~3] 1.5 Instrumentation, measurement and Metrology

[17p-PA03-1] Improvement of detection sensitivity by surface treatment of phosphor for UVC sensor

〇(M1)Ami Hitomi¹, Toru Katsumata^1,2, Hiroaki Aizawa¹ (1.Toyo Univ., 2.Toyo Inst.)

Keywords:UVC sensor, Photoluminescence, Surface

UVC intensity was measured by fluorescence-enhanced Si-PD (FE-PD) . Surface of the red fluorescent acrylic resin used as a phosphor of the FE-PD was modified into triangular roofs and square pyramids. By processing the surface of the red fluorescent acrylic resin into a triangular roof or square pyramidal shapes, UVC intensity could be measured high sensitivity.