1:30 PM - 3:30 PM
[17p-PA07-6] Selective Etching of Hydrogen-Free Diamond-Like Carbon Films on Atomic Hydrogen Exposure
Keywords:diamond-like carbon, atomic hydrogen exposure, selective etching
The effect of atomic hydrogen exposure on the three hydrogen-free diamond-like carbon (DLC) films with different sp3/sp2 ratio was investigated by a photoelectron spectroscopy. Although a peak in the C 1s core-level photoelectron spectrum of the hydrogen-free DLC film was located at ~284.4 eV before atomic hydrogen exposure, it shifted at ~285.2 eV after atomic hydrogen exposure. This indicates that the sp2 hybridized carbon atoms were selectively etched by atomic hydrogen exposure. In the presentation, we will discuss the details of the selective etching of hydrogen-free DLC films on atomic hydrogen exposure.