[17p-PB03-1~7] 13.9 Compound solar cells

[17p-PB03-1] The sputtering gas pressure dependence for the bending resistance of Mo conducting film deposited on flexible substrates

〇Yuu Takeuchi¹, Takuto Maeda¹, Takuya Takahashi¹, Mutsumi Sugiyama^1,2 (1.Tokyo Univ. Sci., 2.RIST)

Keywords:Polyimide substrates, cracks, Molybdenum conducting film