[18p-A202-1~8] CS.6 Code-sharing Session of 8.3 & 9.2 & 13.6

[18p-A202-5] Field Emission Characteristics and Simulation of Field Distribution for Carbon Nanowall Structures

〇Shungo Harajiri¹, Lei Huang¹, Kungen Teii¹ (1.Kyushu Univ.)

Keywords:plasma-enhanced CVD

Carbon nanowalls were fabricated by moderate-pressure microwave plasma-enhanced chemical vapor deposition, and their field emission characteristics were examined. The field intensity distribution near top surface of carbon nanowalls under an applied field was examined by simulation. The field intensity distribution was simulated with changing spacing, tip shape, and height of walls, and compared with the field emission characteristics obtained experimentally.