[18p-A405-1~11] 3.6 Laser processing (formerly 3.7)

[18p-A405-5] Control of lens position using laser-generated sound in laser drilling

〇Yoshio Hayasaki¹, Takuma Miura¹, Kota Kumagai¹ (1.Utsunomiya Univ.)

Keywords:computer-generated holography, ultrasound, interposer

In this research, we propose a method for an axial position control of an objective lens using a laser-generated sound in laser drilling of a glass and investigate the laser processing performance as indexes of the depth, strcutures, and speed of the hole.