3:45 PM - 4:00 PM
[18p-B401-11] Fabrication and characterization of two-dimensional electron gas multi-channel structures induced by AlN/AlGaN heterointerfaces
Keywords:AlGaN, sputtering, epitaxy
Presentation information
Oral presentation
15 Crystal Engineering » 15.4 III-V-group nitride crystals
[18p-B401-1~13] 15.4 III-V-group nitride crystals
Sat. Mar 18, 2023 1:00 PM - 4:30 PM B401 (Building No. 2)
Motoaki Iwaya(Meijo Univ.), Shuhei Ichikawa(Osaka Univ.)