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[18p-E102-10] Proposal and evaluation of dissolved oxygen image sensor
using Iridium Oxide as sensing membrane
Keywords:Dissolved Oxygen
In this study, we focused on Iridiumu oxide (IrOx), which can be fibered into different stable states of trivalent and tetravalent, and fabricated a dissolved oxygen (DO) image sensor with an IrOx film deposited on a potentiometric array sensor and evaluated its response characteristics to the DO. The fabricated DO sensor showed a sensitivity of 27 mV/log[O2] ppm in response to the DO, demonstrating that the IrOx thin film functions as a DO-sensitive film, and an imaging device that can measure DO in liquids as a two-dimensional distribution was successfully fabricated by depositing the IrOx on the potentiometric array sensor.