[18p-E102-1~13] 12.7 Biomedical Engineering and Biochips

△ [18p-E102-2] Examination and fabrication of pixel structure for filter-free wavelength sensor array

〇(B)Ryoya Matsubara¹, Yong-Joon Choi¹, Tomoya Ide¹, Yasuyuki Kimura¹, Takeshi Hizawa¹, Kazuhiro Takahashi¹, Toshihiko Noda¹, Kazuaki Sawada¹ (1.Toyohashi Univ of Tech.)

Keywords:Filter-free wavelength sensor

We will study the pixel structure, fabrication, and evaluation of a filter-free wavelength sensor array capable of acquiring two-dimensional wavelength information. The proposed sensor discriminates wavelengths by utilizing the fact that the penetration depth of light into silicon differs for each wavelength. 3x3 pixel sensors were fabricated, and the wavelength response was confirmed by irradiating light onto all pixels. In addition, we evaluated whether it is possible to discriminate the wavelength and spatial difference when a part of the light spot is irradiated with different wavelengths.