Special Interest Session: High Performance of Ceramics and Manufacturing Process Innovation

[2-25] Invited Talk: Development of damage-free figuring and finishing techniques for ceramics materials by utilizing reactive plasma

*Kazuya Yamamura¹ (1. Osaka University, Graduate School of Engineering)

Keywords:Functional ceramics, Reactive plasma, Single crystal silicon carbide, Single crystal gallium nitride, Reaction sintered silicon cabide, Plasma CVM, Plasma assisted polishing