Improved thermal stability of titanium nitride nanocylinder arrays by dielectric layers

Presentation information

Special Issue: Recent Developments in Optical Materials

Tue. Jun 4, 2019 1:40 PM - 2:40 PM Room III (2F, Room 202)

Chairperson: Kenji OKADA (Osaka Prefecture University)

2:10 PM - 2:25 PM

^○Shinya Goya¹, Shunsuke Murai¹, Katsuhisa Tanaka¹ (1. Graduate School of Engineering, Kyoto University)

Keywords:Plasmonics, Titanium Nitride, Atomic Layer deposition

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