Optimization method of thin film deposition conditions using machine learning

Yusaku Nakamura

Presentation information

Special Session » Materials Development for Electronic Components in the DX/GX Era

Materials Development for Electronic Components in the DX/GX Era

Thu. Oct 19, 2023 4:20 PM - 5:30 PM Room II (Clover Hall)

Chairperson:Yuzo SHIMADA(Japan Jisso Technology Transfer Association)

5:20 PM - 5:30 PM

[2-23B] Optimization method of thin film deposition conditions using machine learning

*Yusaku Nakamura¹, Takaki Hamamoto¹, Hiroki Nakagawa¹, Kuniaki Tanaka¹, Shinji Taniguchi¹, Kenichi Shimomai¹, Yoshiki Iwazaki¹ (1. TAIYO YUDEN CO., LTD.)

Keywords:Machine learning, Thin film, Deposition, SiOF, Temperature compensated film

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