[2Bp02-12] マイクロビームアナリシス技術部会

[2Bp09] In-situ formation of micro- and nanobubbles in a scanning electron microscope

Koji Takahara¹, *satoru suzuki¹ (1. LASTI, University of Hyogo)

Surface micro- and nanobubbles were formed by electron irradiation under a low magnification observation condition in a conventional scanning electron microscope. The irradiation dose rate used in this study was 5-7 orders of magnitude smaller than those in previous TEM studies. The cross-sectional shape of the bubbles was hemispherical regardless of size, and no pancake-shaped bubbles reported in previous AFM studies were observed. The lifetime of the bubble was at least 3 days.