2021年日本表面真空学会学術講演会

Presentation information

Poster (core time)

[2P01-37] Poster

Thu. Nov 4, 2021 3:30 PM - 5:30 PM P会場 (P会場)

座長
15:30-16:30 吉田靖雄(金沢大)
16:30-17:30 勝部大樹(長岡技術科学大)

[2P15] Characterization of deep interface states in SiO2/B-doped CVD diamond using the transient photocapacitance method

*osamu maida1, Taishi Kodama1, Daisuke Kanemoto1, Tetsuya Hirose1 (1. Graduate School of Engineering, Osaka University)

The SiO2/B-doped diamond interface was characterized using a transient photocapacitance technique. We could observe the increase in the signal intensity owing to photon irradiation in the energy range above 1.2 and 1.5 eV. It is considered that the former is due to the acceptor-type defect in the depletion layer of the diamond MOS diode. On the other hand, the latter has not been reported previously and is expected to be due to an interface state of the SiO2/B-doped diamond.