2021年日本表面真空学会学術講演会

Presentation information

Poster (core time)

[3P01-27] Poster

Fri. Nov 5, 2021 1:30 PM - 3:30 PM P会場 (P会場)

座長
13:30-14:30 一ノ倉聖(東工大)
14:30-15:30 土師将裕(東大)

[3P25] Characteristic of outgassing for 0.2 percent Be-Cu

*kaoru wada1, Junichiro Kamiya2, Katsuya Kuramoti3 (1. TOKYO ELECTRONICS CO., LTD., 2. JAPAN ATOMIC ENERGY AGENCY, 3. TOTAL SUPPORT SYSTEMS CORPORATION)

0.2% Be-Cu material is used as an ultra-high vacuum gauge, a high-performance mass spectrometer, and an ultra-high vacuum material etc. Because, it has characteristics such as high thermal conductivity, low thermal radiation, and low outgassing. The outgassing of BeCu has been measured by the build-up method, and it is known that it is very small amount. Therefore, we measured the outgassing speed by a general baking method of the chamber made of stainless steel. And the characteristics of BeCu and SUS304 were compared.