口頭発表

[1Hp01-06] Semiconductor/Magnetic, Electronic, and Photonic devices/Electronic Material Processing (SE/TF/EMP/MI/MS)

2023年10月31日(火) 14:00 〜 15:45 中会議室232 (3階)

Chair:池田浩也(静岡大学)、小野晋吾(名古屋工業大学)

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14:00 〜 14:30

[1Hp01(招待講演)] Multifunctional nanostructured materials to devices

*Harish Santhanakrishnan^1,2 (1. Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-Ku, Hamamatsu, Shizuoka 432-8011, Japan , 2. Functional Materials and Energy Devices Laboratory, Department of Physics and Nanotechnology, SRM Institute of Science and Technology, Kattankulathur, India, 603203)

14:30 〜 14:45

[1Hp02] Effect of interface between neodymium fluoride thin film and oxide or fluoride substrate on vacuum ultraviolet photoconductivity

*Gakuto Ozawa¹, Yusuke Horiuchi¹, Tomoki Kato¹, Marilou Cadatal-Raduban^2,3, Shingo ONO¹ (1. Department of Physical Science and Engineering, Nagoya Institute of Technology, 2. Centre for Theoretical Chemistry and Physics, School of Natural Sciences, Massey University, 3. Institute of Laser Engineering, Osaka University)

14:45 〜 15:00

[1Hp03] Metal pattern formation based on selective deposition using soft organofluorine materials

*Tsuyoshi Tsujioka¹ (1. Osaka Kyoiku University)

15:00 〜 15:15

[1Hp04] Novel non-destructive method to evaluate cleaning performances of three-dimensional nanostructures on Si ∼Au embedding at the bottoms of deep trenches on Si by metal-assisted chemical etching∼

*Tomoki Higashi¹, Shiika Murase², Kouji Inagaki¹, Kenta Arima¹ (1. Graduate School of Engineering, Osaka University, 2. School of Engineering , Osaka University)

15:15 〜 15:30

[1Hp05] Novel non-destructive method to evaluate cleaning performances of three-dimensional nanostructures on Si ~ Angle-resolved photoemission spectra of Au resided at the bottoms of deep trenches on Si~

*Shiika Murase¹, Tomoki Higashi², Kouji Inagaki², Kenta Arima² (1. Division of Applied Science, School of Engineering, Osaka University, 2. Department of Precision Engineering, Graduate School of Engineering, Osaka University)

15:30 〜 15:45

[1Hp06] Tall ZnO nanorods grown on NiCu fabrics for flexible thermoelectric devices

*Hiroya Ikeda¹, Naoki Fujiwara¹, Koki Kato¹, Rohini Palanisamy², Pandiyarasan Veluswamy², Navaneethan Mani³, Masaru Shimomura¹, Yasuhiro Hayakawa¹, Toshitaka Yamakawa⁴, Kazushi Ikeda⁴, Hiromu Hamasaki¹ (1. Shizuoka University, 2. Indian Institute of Information Technology, Design and Manufacuturing, Kancheepuram, 3. Sri Ramaswamy Memorial Institute of Science and Technology, 4. Nara Institute of Science and Technology)

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