[1Ep01-05] Development of Data Processing and Data Utilization in Surface Analysis: Surface Analysis Division's Session

[1Ep05] Optimization Strategies for Peak Area Measurement in Practical XPS Analysis

*Noriaki Sanada¹ (1. ULVAC-PHI, Inc.)

The issue of reproducibility of practical XPS quantitative measurement results should have been dictated in the field, but is thought to be often forgotten and not to be proven. It is necessary to detect minute differences between samples in order to contribute to the correct direction of research and development. In this study, we focused on setting the background range during peak area measurement in XPS quantitative analysis. Using XPS spectra simulating low S/N, we validated numerical methods for peak area measurement using various verification calculations including error calculations and Monte Carlo methods. The conclusion of this study is to "set the background range as narrow as possible with respect to the peak" considering shortening the measurement time.