[1P01-52] Poster Presentation

[1P25] Deposition of amorphous oxidized carbon films with PECVD using ether molecules as source molecules.

Atsuya Kuwada¹, Tatsuo Nakai¹, Yuya Ooishi¹, *Masanori Shinohara² (1. Graduate School of Engineering, Fukuoka University, 2. Department of Electrical engineering, Fukuoka University)

Deposition process of amorphous oxidized carbon film with PECVD using ether molecules as sources is investigated with MIR-IRAS. C=O density in the deposited film can be controlled with choice of source molecules.