[1P34] Characterization of strain gauge with Co-AlO granular film and FeSiBNb amorphous film
Recently, various objects have become targets for sensing in order to realize an IoT society, and sensors are required higher sensitivity and miniaturization. In application of many automotive, aerospace, and industrial fields, there is a high need for compact sensors to measure mechanical quantities such as strain, stress. We propose a new strain gauge which compose of a granular film and soft magnetic yokes. An AC voltage is applied to the series circuit of the gauge and the variable resistor. When the strain is applied to the gauge, the strain is detected as a voltage of the gauge. The output voltage became large with increasing strain, and gradually almost constant because the magnetic moments of yokes saturated in direction of H//gap. This indicates that the strain up to about 6.0 × 10-5 can be detected. The gauge factor estimated was approximately 50, larger than that of a typical metal strain gauge.
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