[1P01-52] Poster Presentation

[1P35] Photoelectron spectroscopy study of amorphous carbon thin films as a function of annealing temperature

*Yuichi Haruyama¹, Kumiko Yokota², Masahito Tagawa² (1. Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 2. Graduate School of Engineering, Kobe University)

The electronic structure in amorphous carbon thin films as a function of annealing temperature was investigated by photoelectron spectroscopy. Before annealing, a broader peak at 285 eV was observed in the photoelectron spectroscopy spectrum of the C 1s core level. The photoelectron spectra of the C 1s core level became narrower with increasing annealing temperature. This indicates that the coordination of C atoms in amorphous carbon thin films was changed. By using the curve fitting analysis of the C 1s photoelectron spectroscopy spectra, the coordination of C atoms in amorphous carbon thin films was evaluated as a function of annealing temperature. In addition, the photoelectron spectra of the valence band region as a function of annealing temperature were also measured. In the presentation, the electronic structure of amorphous carbon thin films as a function of annealing temperature is discussed.