2023年日本表面真空学会学術講演会

講演情報

ポスター発表

[2P01-53] Poster Presentation

2023年11月1日(水) 17:00 〜 18:30 ポスター (1階)

[2P17] Simultaneous measurement of local barrier height and local contact potential difference by voltage pulse scanning probe microscopy

*Emiko Murata1, Hibiki Hikasa1, Daiki Katsube2, Abe Masayuki 3, Eiichi Inami1 (1. Graduate School of Engineering, Kochi University of Technology, 2. Cluster for Pioneering Research, RIKEN, 3. Graduate School of Engineering Science, Osaka University)

Accurate measurement of the local work function (LWF) is crucial for enhancing the performance of electronic/optoelectronic devices. Currently, LWF can be measured by scanning tunneling microscopy or atomic force microscopy. However, in the both cases, direct determination of the LWF requires pre-calibration of the tip’s LWF, while it is known that the condition of the tip apex and its associated LWF often change during the measurement. In this study, we developed alternative method to directly measure the LWF. Our method is based on frequency modulation AFM with a conductive tip, which allows simultaneous measurements of local barrier height and local contact potential difference, thus enabling the direct evaluation of LWF without any pre-calibration as in conventional methods. I will present the detailed principle of our method and the results in the session.

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