2023年日本表面真空学会学術講演会

講演情報

ポスター発表

[2P01-53] Poster Presentation

2023年11月1日(水) 17:00 〜 18:30 ポスター (1階)

[2P24] Photoelectron spectroscopy of Si{111} facet surfaces on artificially-designed three-dimensional facet-lined structures

*Ni'matil Mabarroh1, Juharni Juharni1, Yasunari Kimoto1, Yoshihiro Kitagawa1, Yuki Ida1, Wataru Imayama1, Liliany N. Pamasi1, HaoBang Yang1, Yuya Sakai1, Tomoya Shimizu1, Azusa N. Hattori2, Shin-Ichiro Tanaka2, Shigemasa Suga2, Hidekazu Tanaka2, Wang Runcheng3, FangZhun Guo3, Kiyohisa Tanaka4, Ken Hattori1 (1. Graduate School of Science and Technology, Nara Institute of Science and Technology, 2. SANKEN, Osaka University, 3. Institute of Mechanical Engineering, Dalian Jiaotong University, 4. UVSOR Synchrotron Facility, Institute for Molecular Science)

We demonstrate the construction of an epitaxial grown film on Si{111} facet surfaces and film band structures, which promise electronic devices using 3D shaped high-crystalline films in future. We have constructed 3D-Si facet-lined structures on Si(001) substrates with (111) and(-1-11) facet surfaces, showing 7×7 reconstruction in low-energy electron diffraction (LEED) and created well-ordered √3×√3-Ag as a prototype of a functional thin-film. We obtained clear spots Si{111}7×7 and √3×√3-Ag reconstruction and successfully obtained the surface and bulk band structure, in both facet surfaces. In order to survey specific states arising from the singular 3D regions such as edges, we measured Si 2p core levels depending on the optical geometry to discuss chemical components.

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