[3Fa01-05] Surface Engineering/Thin Film

[3Fa03] Enhancement of cathodoluminescence of YAlO₃:Gd³⁺ by fabricating on LaAlO₃ buffer layer for high-resolution bio-imaging

*Kei Hosomi¹, Wataru Inami¹, Yoshimasa Kawata¹ (1. Research Institute of Electronics, Shizuoka University)

We fabricated Gd³⁺-doped YAlO₃ perovskite (YAP) thin film on LaAlO₃ (LAO) buffer layer to obtain an intense cathodoluminescence as an optical probe of electron beam excitation assisted (EXA) optical microscopy. Depositing YAP on pre-annealed LAO layer and annealing of YAP in oxygen gas enhanced CL intensity compared with O₂-annealed YAP without LAO layer by 4-times. Crystallization of perovskite host would increase quantum efficiency in Gd³⁺ color center. Results of CL acquired in FE-SEM and CL images taken in the EXA microscopy suggested that the prepared YAP luminescent film on LAO buffer layer is expected to be a candidate of optical probe for EXA microscopy.