2023年日本表面真空学会学術講演会

講演情報

口頭発表

[3Fa01-05] Surface Engineering/Thin Film

2023年11月2日(木) 09:30 〜 10:45 中会議室223 (2階)

Chair:下村 勝(静岡大学)、市村 正也(名古屋工業大学)

10:30 〜 10:45

[3Fa05] Numerical and experimental investigation of the stoichiometry of BSCCO thin films deposited using fs-PLD

*Joy Kristelle De Mata1, Wilson Garcia2, Roland Sarmago2, Lean Dasallas1 (1. Materials Science and Engineering Program, University of the Philippines Diliman, 2. National Institute of Physics, University of the Philippines Diliman)

Femtosecond laser has several advantages over nanosecond laser as it produces efficient thermal abla- tion and reduces the formation of molten particulates. Because of this, there has been an increasing interest in using femtosecond lasers in pulsed laser deposition over recent years. This work explores the use of a femtosecond pulsed laser to deposit BSCCO. BSCCO was deposited in different substrate positions to investigate the effect of spatial variation on the elemental ratio of deposited BSCCO. The experimental values were then compared with an existing collision-based model, a modified collision- based model, and a peak-fitting distribution. The peak fitting analysis has the nearest approximation to the experimental data among the three numerical models.

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