On the use of a femtosecond laser micro-processing combined with chemical etching for free-form microstructures in ultra-low expansion (ULE) glass<br /><span style="color:#008000;">[Student presentation]</span>

5:10 PM - 5:30 PM

[R3-S07-3] On the use of a femtosecond laser micro-processing combined with chemical etching for free-form microstructures in ultra-low expansion (ULE) glass
[Student presentation]

*Gözden Torun¹, Samuel Benketaf¹, Margarita Lesik¹, Pieter Vlugter¹, Yves Bellouard¹ (1. EPFL Galatea Lab. (Switzerland))

Keywords:ultra-low expansion glass, 3D microstructures, femtosecond laser processing, wet chemical etching, micro-devices

C000216

Abstract password authentication.
Password is required to view the abstract. Please enter a password to authenticate.