Femtosecond UV laser writing technique for selective etching in fused silica

Presentation information

Oral Presentation

Oral Presentations

Tue. Jun 13, 2023 4:30 PM - 6:10 PM Room 3 (1F Meeting Room ＃1)

Session Chairs:Kotaro Obata(RIKEN, Japan)

5:30 PM - 5:50 PM

*Benedikt Hermann¹, Yves Bellouard¹ (1. EPFL (Switzerland))

Keywords:Fused Silica, Micro Structuring, UV , Etching

C000225

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