The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

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Oral Presentation

Oral Presentations

Session 12: Surface processing 2

Wed. Jun 14, 2023 9:20 AM - 11:00 AM Room 4 (2F Meeting Room #6)

Session Chairs:Godai Miyaji(Tokyo University of Agriculture and Technology, Japan)

9:40 AM - 10:00 AM

[R4-S12-2] Free-standing thin film processing by femtosecond laser

*Saulius Juodkazis1,3, Haoran Mu1, Daniel Smith1, Soon Hock Ng1, Tomas Katkus1, Daniel Moraru2, Vygantas Mizeikis2 (1. Swinburne Univ. Technol. (Australia), 2. Shizuoka Univ. (Japan), 3. WRH Program International Research Frontiers Initiative (IRFI), Tokyo Institute of Technology (Japan))

Keywords:Si membrane, diamond, ablation, ultra-short laser pulses

C000173

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