Session 12: Surface processing 2

[R4-S12-2] Free-standing thin film processing by femtosecond laser

*Saulius Juodkazis^1,3, Haoran Mu¹, Daniel Smith¹, Soon Hock Ng¹, Tomas Katkus¹, Daniel Moraru², Vygantas Mizeikis² (1. Swinburne Univ. Technol. (Australia), 2. Shizuoka Univ. (Japan), 3. WRH Program International Research Frontiers Initiative (IRFI), Tokyo Institute of Technology (Japan))

キーワード：Si membrane, diamond, ablation, ultra-short laser pulses

C000173