The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

講演情報

印刷

Oral Presentation

Oral Presentations

Session 21: Ultra-short pulse laser processing 3 (Drilling, Cutting)

2023年6月15日(木) 09:20 〜 11:00 Room 1 (2F Meeting Room #3)

Session Chairs:Mizue Mizoshiri(Nagaoka University of Technology, Japan,)

10:00 〜 10:20

[R1-S21-3] Material and ultrashort pulse laser parameters influencing the ablation quality of multi-layer thin film systems

*Astrid Sassmannshausen1, Semjon Mooraj2, Martin Kratz3 (1. Chair for Laser Technology - RWTH Aachen University (Germany), 2. Saint-Gobain Sekurit Deutschland GmbH (Germany), 3. Fraunhofer Institute for Laser Technology (Germany))

キーワード：selective thin film ablation, laser patterning, ultrashort pulse, multi-layer thin film, ultrafast

C000124

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