The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

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Oral Presentation

Oral Presentations

Session 35: Special Session 2-3 "Machine Learning and Simulation for Laser Processing"

Fri. Jun 16, 2023 9:10 AM - 10:40 AM Room 3 (1F Meeting Room ＃1)

Session Chairs:Kenichi Ishikawa(The University of Tokyo, Japan), Tomohito Otobe(National Institutes for Quantum and Radiological Science and Technology, Japan)

10:00 AM - 10:20 AM

[R3-S35-3] Study of Laser Excitation and Damage Threshold in Silicon Using Three-Temperature Model

*Prachi Venkat1, Tomohito Otobe1,2 (1. Kansai Photon Science Institute, National Institutes for Quantum Science and Technology, Kyoto (Japan), 2. Photon Science Center, The University of Tokyo (Japan))

Keywords:Laser processing, Three-temperature model, Simulation

C000053

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