The 41st Annual Meeting of The Laser Society of Japan

Presentation information

Oral Presentation

D: Laser processing

[D04-19p-IV] レーザー基礎・新技術

Tue. Jan 19, 2021 3:15 PM - 5:35 PM IV

Chair:Hiroshi Ikenoue

5:00 PM - 5:15 PM

[D04-19p-IV-06] レーザープラズマ3nm軟X線による半導体リソグラフィーの検討

*Sho Amano1 (1. University of Hyogo)

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