The 41st Annual Meeting of The Laser Society of Japan

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Poster Presentation

D: Laser processing

[P01-19a-P] Ｄ：レーザープロセシング

Tue. Jan 19, 2021 9:00 AM - 12:00 PM Poster Session

9:00 AM - 12:00 PM

[P01-19a-P-17] 【優秀ポスター発表賞応募演題】
エキシマレーザーアニールの追加照射による低温ポリシリコン薄膜の表面粗さの改善と電気特性評価

*Fuminobu Hamano1, Akira Mizutani2, Kaname Imokawa2, Tetsuya Goto3, Daisuke Nakamura1, Hiroshi Ikenoue2,1 (1. Kyushu Univ., 2. Dept. of Gigaphoton Next GLP, Kyushu Univ., 3. Tohoku Univ.)

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