S4 Advances in Tribology Science and Engineering

[3D01-06-01] Nitrogen-doped diamond-like carbon deposited on glass using filtered cathodic vacuum arc with high-frequency pulsed DC bias

*WooYoung Lee¹, HyangJi Shim¹, Jae-Il Kim², Noritsugu Umehara³ (1. Korea Photonics Technology Institute (Korea), 2. Korea Institute of Materials Science (Korea), 3. Nagoya University (Japan))

Keywords:DLC, Nitrogen doping, Glass, FCVA, Raman