[5] MEMS、医療センサ

[5-20] Production of Glass-to-glass Anodically-bonded Interfaces in Which Conductive Areas and Insulating Areas Coexist

一般講演

^○Makoto TAKAHASHI (大阪大学接合科学研究所)

Keywords:陽極接合、ガラス／ガラス重ね接合、陽極酸化、界面の機能化、電気伝導