[B4-O10] Slot 10

[B4-O10-03 (Symposium Invited)] Introducing Epitaxial Nitride Ferroelectrics to III-N Technology

Georg Schönweger¹, Adrian Petraru¹, Md Redwanul Islam², Niklas Wolff², Timo Rieß², Fabian Lofink³, Lorenz Kienle², Hermann Kohlstedt¹, *Simon Fichtner^2,3 (1. Institute of Electrical Engineering and Information Engineering, Kiel University, Kaiserstr. 2, D-24143 Kiel (Germany), 2. Institute for Material Science, Kiel University, Kaiserstr. 2, D-24143 Kiel (Germany), 3. Fraunhofer Institute for Silicon Technology (ISIT), Fraunhoferstr. 1, D-25524 Itzehoe (Germany))

キーワード：Ferroelectric, AlScN, wide bandgap semiconductor, compound semiconductor, high temperature