X-ray Tomographic Analysis Using Differential Aperture Technique for AlN Grown on Nano-Patterned Sapphire Substrates

Yusuke Hayashi

Presentation information

Oral Session

D. Frontiers of Advanced Electronic Materials » [D-4] Synchrotron Radiation Based Materials Research: Present and the Future

[D4-O2] Slot 02

Mon. Dec 13, 2021 1:30 PM - 5:00 PM Room S (G320)

Chair: Yasuhiko Imai (JASRI), Hiroshi Uchiyama (JASRI)

2:10 PM - 2:35 PM

[D4-O2-02 (Symposium Invited)] X-ray Tomographic Analysis Using Differential Aperture Technique for AlN Grown on Nano-Patterned Sapphire Substrates

*Yusuke Hayashi¹, Yasuhiko Imai², Nozomi Yamamoto¹, Tetsuya Tohei¹, Kazuhshi Sumitani², Shigeru Kimura², Kanako Shojiki³, Hideto Miyake³, Akira Sakai¹ (1. Osaka Univ. (Japan), 2. JASRI (Japan), 3. Mie Univ. (Japan))

Keywords:AlN, Nano-Patterned Sapphire Substrate, DUV-LED, Synchrotron XRD

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