[D5-PR13] Slot 13

[D5-PR13-08] Automatic Estimation of XPS Reference Spectra for TiO2 Semiconductor Free from Equipment-derived Arbitrariness

*Ryo Murakami¹, Kenji Nagata², Hideki Yoshikawa², Hiroshi Shinotsuka², Hayaru Shouno¹ (1. The University of Electro-Communications (Japan), 2. NIMS (Japan))

キーワード：X-ray Photo-electron Spectroscopy, Automatic peak separation of multiple-spectra, spectral analysis