Thermal desorption spectroscopy (TDS) for quantitative analysis of low hydrogen concentration in thin-film samples

Presentation information

Poster Session

E. Energy Science and Technologies » [E-5] Hydrogen in Functional Materials II

Tue. Dec 14, 2021 4:00 PM - 6:00 PM E5-PR14 (G403-404)

4:00 PM - 6:00 PM

*Hidenori Hiramatsu¹, Taku Hanna¹, Isao Sakaguchi², Hideo Hosono¹ (1. Tokyo Inst. Tech. (Japan), 2. NIMS (Japan))

Keywords:hydrogen, TDS, Q-Mass, detection limit

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