[H2-PR18] Slot 18

[H2-PR18-01] Preparation of elemental gradient functional thin films by using mixture powder targets

*Hiroharu Kawasaki¹, Tamiko Ohshima¹, Yoshihito Yagyu¹, Takeshi Ihara¹, Yoshiaki Suda², Yusuke Hibino¹ (1. Nat. Ins. Tech., Sasebo Col. (Japan), 2. Nat. Ins. Tech., Ishikawa Col. (Japan))

キーワード：Sputtering, , Elemental gradient functional thin film, Powder target