Materials Research Meeting 2021

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Poster Session

H. Innovative Materials Processing for Sustainable Society » [H-2] Plasma-Based Synthesis, Processing and Characterization of Materials for Energy and Environment

[H2-PR18] Slot 18

Thu. Dec 16, 2021 6:30 PM - 8:30 PM H2-PR18 (G403-404)

6:30 PM - 8:30 PM

[H2-PR18-03] Effects of Deposition Pressure on Electrochromic Properties of WO3 Films Sputtered with Glancing-angle Deposition Scheme

Yuji Horikoshi1, *Hiroki Tano1, Yasushi Inoue1, Osamu Takai2 (1. Chiba Inst. of Tech. (Japan), 2. Kanto Gakuin Univ. (Japan))

Keywords:Electrochromism, Tungsten oxide, Sputtering, Glancing-angle Deposition

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