[H2-PR18] Slot 18

[H2-PR18-06] Structural analysis of carbon nanoparticle composite films prepared by Ar+CH₄ multi-hollow plasma chemical vapor deposition

*Sung-Hwa Hwang¹, Shinjiro Ono¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Naho Itagaki¹, Kazunori Koga^1,2, Tatsuyuki Nakatani³, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. Nat'l Inst. of Nat. Sci. (Japan), 3. Okayama Univ. (Japan))

キーワード：Carbon nanoparticles, Hydrogenated amorphous carbon, Plasma chemical vapor deposition, Raman spectroscopy